Integrated TiC coatings for moving MEMS

  title={Integrated TiC coatings for moving MEMS},
  author={Gayathri Radhakrishnan and Ruby E. Robertson and Paul M. Adams and Robert Clay Cole},
The application of wear-resistant coatings to microelectromechanical systems (MEMS) devices offers the potential of addressing the reliability of moving MEMS devices. However, coating non-line-of-sight, concealed surfaces in fully released 3D MEMS structures, especially those behind micron-sized apertures, is a difficult problem to overcome with most deposition techniques. A practical and viable solution to this problem is the direct integration of wear-resistant coatings into the MEMS… CONTINUE READING