Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications

@article{Wei2013IntegratedPF,
  title={Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications},
  author={Jia Li Wei and Marcello Porta and Marcel Tichem and Urs Staufer and P. M. Sarro},
  journal={Journal of Microelectromechanical Systems},
  year={2013},
  volume={22},
  pages={1310-1326}
}
This paper presents two integrated piezoresistive sensors capable of detecting simultaneously both the contact force and the contact position of a micro-object in micro-handling applications. The first sensor detects the 1-D contact position in vertical direction along a contact surface. The second sensor extends the sensing principle and detects the… CONTINUE READING