Integrated Optical Pressure Sensors in Silicon-on-Insulator

@article{Hallynck2012IntegratedOP,
  title={Integrated Optical Pressure Sensors in Silicon-on-Insulator},
  author={Elewout Hallynck and Peter Bienstman},
  journal={IEEE Photonics Journal},
  year={2012},
  volume={4},
  pages={443-450}
}
An optical pressure sensor can be useful in many applications where electronics fall short (e.g., explosive environments). We have fabricated and characterized compact, integrated optical pressure sensors on a silicon-on-insulator platform using ring resonators and Mach-Zehnder interferometers. The silicon substrate is locally etched using KOH to produce very thin membranes of 3.28 μm. Measurements have shown that spectral features in our devices can shift up to 370 pm going from 0 to 80 kPa. 

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References

Publications referenced by this paper.
Showing 1-10 of 43 references

Blind, BImbalanced Mach–Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor,

H. Porte, V. Gorel, S. Kiryenko, J.-P. Goedgebuer, W. Daniau
J. Lightw. Technol., • 1999
View 4 Excerpts
Highly Influenced

BSilicon microring resonators,[ Laser Photon

W. Bogaerts, P. De Heyn, +7 authors R. Baets
Rev., vol. 6, • 2012
View 1 Excerpt

and P

D. A. Singlehurst, C. R. Dennison
M. Wild, BComprising multiplexed in-Fibre Bragg gratings within a flexible superstructure,[ J. Lightw. Technol., vol. 30, no. 1, pp. 123–129 • 2012
View 1 Excerpt