Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically-Actuated MEMS Switch

Abstract

The dynamic response of a radio-frequency micro-electro mechanical system (RF MEMS) to a time-varying electrostatic force is optimized to enhance robustness to variations in material properties and geometry. The device functions as an electrical switch, where an applied voltage is used to close a circuit. The objective is to minimize the severity of the… (More)

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Cite this paper

@inproceedings{Allen2007InputAD, title={Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically-Actuated MEMS Switch}, author={Mathew S. Allen and Jordan E. Massad and Richard V. Field and Christopher W. Dyck}, year={2007} }