The dynamic response of a radio-frequency micro-electro mechanical system (RF MEMS) to a time-varying electrostatic force is optimized to enhance robustness to variations in material properties and geometry. The device functions as an electrical switch, where an applied voltage is used to close a circuit. The objective is to minimize the severity of the… (More)

@inproceedings{Allen2007InputAD,
title={Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically-Actuated MEMS Switch},
author={Mathew S. Allen and Jordan E. Massad and Richard V. Field and Christopher W. Dyck},
year={2007}
}