Innovative metrics for machine performance measurement and their applications in semiconductor manufacturing

@article{Wang2009InnovativeMF,
  title={Innovative metrics for machine performance measurement and their applications in semiconductor manufacturing},
  author={Qiang Wang and Bo Hu Li},
  journal={2009 16th International Conference on Industrial Engineering and Engineering Management},
  year={2009},
  pages={793-797}
}
Reasonable metrics to measure machine performance are appropriate benchmarks for maintenance. The most popular machine performance metrics Machine Availability (MA) has been found that it is not suitable for all the situations. After Scheduled Downtime was excluded from the analysis, Machine Performance (MP) and Machine Failure (MF) were proposed. A case study demonstrates that the proposed two metrics can reflect the machine performance induced by machine self more accurately than MA… CONTINUE READING