Inhomogeneous decomposition of ultrathin oxide films on Si(100): application of Avrami kinetics to thermal desorption spectra.

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@article{Kinefuchi2008InhomogeneousDO, title={Inhomogeneous decomposition of ultrathin oxide films on Si(100): application of Avrami kinetics to thermal desorption spectra.}, author={Ikuya Kinefuchi and Hiroki Yamaguchi and Yukinori Sakiyama and Shu Takagi and Yoichiro Matsumoto}, journal={The Journal of chemical physics}, year={2008}, volume={128 16}, pages={164712} }