Infrared grey-field polariscope: A tool for rapid stress analysis in microelectronic materials and devices

@inproceedings{Horn2005InfraredGP,
  title={Infrared grey-field polariscope: A tool for rapid stress analysis in microelectronic materials and devices},
  author={Gavin P. Horn and Jon R. Lesniak and Thomas J. Mackin and Brad Lee Boyce},
  year={2005}
}
The infrared grey-field polariscope (IR-GFP) has been developed to provide rapid, full-field stress analysis for infrared-transparent materials. Grey-field photoelastic theory is outlined and the advantages of this implementation for microelectronic materials inspection highlighted. The capabilities of this scientific tool are proven using standard sample geometries fabricated from single crystal silicon substrates and the general applicability of the instrument demonstrated on bonded devices… CONTINUE READING

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