Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering

@inproceedings{Pang2009InfluencesOB,
  title={Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering},
  author={Xianjuan Pang and Lei Shi and Peng Wang and Guangan Zhang and Weimin Liu},
  year={2009}
}
Abstract Ti–Al–C films were deposited on silicon (100) substrates using magnetron sputtering TiAl target and graphite target in argon atmosphere at various substrate negative bias voltages. The composition, surface morphology, hardness and friction coefficient of the resulting films were characterized using x-ray photoelectron spectroscope, energy dispersive spectrometry, atomic force microscopy, nanoindentation and tribological tester. Results show that the structure and properties of the… CONTINUE READING