Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope

@inproceedings{Di2015InfluenceRO,
  title={Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope},
  author={Hu Di and Yang Bo and Dai Bo},
  year={2015}
}
Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon microgyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in… CONTINUE READING