Influence of packaging atmospheres on the durability of high-temperature SAW sensors

Abstract

Surface acoustic wave (SAW) devices are a technology of choice for passive, radio-interrogable sensor applications operating under extreme conditions. Suitably designed SAW devices can withstand e.g. temperatures exceeding 400°C. At high temperatures (HT), thermal energies reach values corresponding to the activation energies of reactions between gas… (More)

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@article{Bardong2009InfluenceOP, title={Influence of packaging atmospheres on the durability of high-temperature SAW sensors}, author={Jochen Bardong and Gudrun Bruckner and Martin Kraft and Ren{\'e} Fachberger}, journal={2009 IEEE International Ultrasonics Symposium}, year={2009}, pages={1680-1683} }