Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon ( taC ) films

Abstract

The properties of amorphous carbon ~a-C! deposited using a filtered cathodic vacuum arc as a function of the ion energy and substrate temperature are reported. The sp fraction was found to strongly depend on the ion energy, giving a highly sp bonded a-C denoted as tetrahedral amorphous carbon ~ta-C! at ion energies around 100 eV. The optical band gap was… (More)

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