Influence of atmospheric fluorine plasma treatment on thermal and dielectric properties of polyimide film.

@article{Park2009InfluenceOA,
  title={Influence of atmospheric fluorine plasma treatment on thermal and dielectric properties of polyimide film.},
  author={Soo-Jin Park and Hee-Jin Sohn and S. Hong and Gwi-Su Shin},
  journal={Journal of colloid and interface science},
  year={2009},
  volume={332 1},
  pages={
          246-50
        }
}
Plasma treatment of polyimide surfaces not only causes structural modification during the plasma exposure, but also leaves active sites on the surfaces that are subject to post-reaction. In this work, the effects of atmospheric fluorine plasma treatment on the surface properties and dielectric properties of polyimide thin film were investigated by using X-ray photoelectron spectroscopy (XPS), Fourier transform-IR (FT-IR) spectroscopy, and contact angle measurement. The results indicated that… CONTINUE READING

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