Influence of a weak external B-field on the plasma parameters and spatial emission profiles of inductively and Helicon-coupled hydrogen discharges

@inproceedings{Rauner2015InfluenceOA,
  title={Influence of a weak external B-field on the plasma parameters and spatial emission profiles of inductively and Helicon-coupled hydrogen discharges},
  author={D. Rauner and S. Briefi and Paul Gutmann and Stuewe Kurt and Ursel Fantz},
  year={2015}
}
The effect of a weak external B-field on the properties of RF-coupled hydrogen discharges is investigated as it may promise an increased coupling efficiency in comparison to pure inductive coupling. Therefore, plasma parameters of a weakly magnetized ICP are compared to a low-field Helicon discharge using a Nagoya-Type-III antenna. For both setups, the behavior of the electron temperature and density and the density ratio of atomic to molecular hydrogen with varying magnetic field between 0 and… CONTINUE READING