Influence of RF Power in the Growth of Aluminium Zinc Oxide (AZO) Thin Films by RF Sputtering

@inproceedings{Aliyu2014InfluenceOR,
  title={Influence of RF Power in the Growth of Aluminium Zinc Oxide (AZO) Thin Films by RF Sputtering},
  author={Mohammed Mannir Aliyu and Muhammad Islam and Qamar Huda and Sajedur Rahman and Nowshad Amin},
  year={2014}
}
Aluminium doped zinc oxide (AZO) is fast becoming an important thin film material for applications as transparent conducting oxide (TCO) in several thin film solar cells, smart windows and many devices using touch screen displays. This is due to its good electrical and optical characteristics as well as lower cost and good abundance. Although sputtering is the general method for industrial fabrication of this material, but film characteristics depend strongly on fabrication processes. Thus… CONTINUE READING

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