Influence of Grating Parameters on Reflectivity of Si/SiO_2 High Contrast Gratings

@article{Xiushan2015InfluenceOG,
  title={Influence of Grating Parameters on Reflectivity of Si/SiO_2 High Contrast Gratings},
  author={李秀山 Li Xiu-shan and 宁永强 Ning Yong-qiang and 张. Z. Xing and 贾. J. Peng and 陈泳屹 Chen Yong-yi and 秦. Q. Li and 刘. L. Yun and 王立军 Wang Li-jun},
  journal={Chinese Journal of Luminescence},
  year={2015},
  volume={36},
  pages={806-810}
}
In order to solve the problem of poor stability of high contrast gratings( HCGs) for 850 nm VCSEL,a new type of Si / Si O2 HCGs was put forward. The influence of grating parameters on HCG reflectivity of 850 nm was studied. The influence of the grating parameters,such as height,fill factor,duty,etching depth,angle,on the reflectivity of Si / Si O2 HCGs for 850 nm was simulated and analyzed by the finite element analysis software. For the 850 nm TE light incidence from Si O2 to the rectangular… Expand