Influence of Argon and Nitrogen Admixture in HMDSO/O2 Plasmas onto Powder Formation

  title={Influence of Argon and Nitrogen Admixture in HMDSO/O2 Plasmas onto Powder Formation},
  author={Marina Ricci and Jean-luc Dorier and Ch. Hollenstein and Pierre Fayet},
  journal={Plasma Processes and Polymers},
In situ Fourier transform infrared spectroscopy was used to study the powder formation of hexamethyldisiloxane/O-2 plasmas. The spectra show that oxygen plays an important role at the beginning of the process. A large amount of oxygen is responsible for intense powder formation. The admixture of inert or non-reactant gases, such as AT or N-2, into the plasma promotes polymerization of the monomer. The formation of the particulates, the evolution of their size, and chemical characteristics give… Expand
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