Influence of Annealing and Europium-Doping on the Structure and Optical Properties of ZnO Thin Films Grown on Quartz Substrate by Magnetron Sputtering

@inproceedings{Dai2011InfluenceOA,
  title={Influence of Annealing and Europium-Doping on the Structure and Optical Properties of ZnO Thin Films Grown on Quartz Substrate by Magnetron Sputtering},
  author={Qingqin Dai and Liqiang Luo and Fu Yun Huang and D. P. Xiong and Xin Tang and Jitao Chen},
  year={2011}
}
ZnO and Eu-doped ZnO thin films were deposited on quartz substrates by reactive radio-frequency magnetron sputtering from a ZnO and Eu-doped ZnO ceramic target respectively. The properties of thin films were characterized by atom force microscope (AFM), X-ray diffraction (XRD), and photoluminescence spectra (PL). XRD reveals that the prepared thin films possess a single crystalline hexagonal wurtzite crystal structure with preferential c-axis orientation. Under above-bandgap excitation at room… CONTINUE READING