InGaAsP-InP nanoscale waveguide-coupled microring lasers with submilliampere threshold current using Cl/sub 2/--N/sub 2/-based high-density plasma etching

Abstract

We demonstrate InGaAsP-InP nanoscale waveguide-coupled microring lasers fabricated with inductively coupled plasma (ICP) using Cl/sub 2/--N/sub 2/-based gas mixtures. To fabricate optical waveguides, the requirement of anisotropic profiles and sidewall smoothness is stringent. In particular, for strongly lateral confined nanoscale waveguides used for… (More)

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