In-situ tensile testing of nano-scale specimens in SEM and TEM

@article{Haque2002InsituTT,
  title={In-situ tensile testing of nano-scale specimens in SEM and TEM},
  author={M. A. Haque and Mohammed A. N. Saif},
  journal={Experimental Mechanics},
  year={2002},
  volume={42},
  pages={123-128}
}
  • M. Haque, M. Saif
  • Published 1 March 2002
  • Materials Science, Engineering
  • Experimental Mechanics
We present a new experimental method for the mechanical characterization of freestanding thin films with thickness on the order of nanometers to micrometers. The method allows, for the first time, in-situ SEM and TEM observation of materials response under uniaxial tension, with measurements of both stresses and strains under a wide variety of environmental conditions such as temperature and humidity. The materials that can be tested include metals, dielectrics, and multi-layer composites that… 
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A Novel Method for In Situ Uniaxial Tests at the Micro/Nano Scale—Part I: Theory
  • W. Kang, M. Saif
  • Materials Science
    Journal of Microelectromechanical Systems
  • 2010
A novel MEMS-based uniaxial testing apparatus and a specimen design are presented for measuring the mechanical response of material samples in situ in scanning electron microscope (SEM). The stage
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