In situ optical monitoring of AlAs wet oxidation using a novel low-temperature low-pressure steam furnace design

To reproducibly define small features by oxidizing AlGaAs layers, it is essential to have good control over the oxidation reaction. We have integrated a glass viewport into a low-pressure (5 torr) cold-walled oxidation chamber to enable in situ optical monitoring of the sample during oxidation. To gain additional control, we reduced the oxidation… CONTINUE READING