In-situ observation and surface morphology of YBa 2 Cu 3 O 7-y films by metalorganic chemical vapor deposition

@inproceedings{Yoshida1999InsituOA,
  title={In-situ observation and surface morphology of YBa 2 Cu 3 O 7-y films by metalorganic chemical vapor deposition},
  author={Yutaka Yoshida and Morihiro Iwata and Masato Hasegawa and Kenichi Tamura and Koji Ishizawa and Yoshiaki Takai and Izumi Hirabayashi},
  year={1999}
}
  • Yutaka Yoshida, Morihiro Iwata, +4 authors Izumi Hirabayashi
  • Published 1999
  • Materials Science
  • YBa2Cu3O7 thin films were prepared on single-crystalline substrates by metalorganic chemical vapor deposition (MOCVD) with liquid sources. We investigated surface morphology of the samples by atomic force microscopy (AFM), and found the abrupt change in the terrace width and the supersaturation ratio at the deposition temperature of around 750°C. We suggest the appearance of a quasi-liquid on the growing crystal surface and this transition temperature corresponds to the growth change from the… CONTINUE READING

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