In-situ etching of GaAs/Al x Ga 1- x As by CBr 4

@inproceedings{Maassdorf2008InsituEO,
  title={In-situ etching of GaAs/Al x Ga 1- x As by CBr 4},
  author={Andre Maassdorf and Markus Weyers},
  year={2008}
}