In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration

  title={In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration},
  author={Philipp-Immanuel Dietrich and Matthias Blaicher and I. Reuter and Muhammad Rodlin Billah and Tobias Hoose and Andreas Hofmann and Charles Caer and Roger Dangel and Bert Jan Offrein and Ute Troppenz and Martin Moehrle and Wolfgang Freude and Christian Koos},
  journal={Nature Photonics},
Hybrid photonic integration combines complementary advantages of different material platforms, offering superior performance and flexibility compared with monolithic approaches. This applies in particular to multi-chip concepts, where components can be individually optimized and tested. The assembly of such systems, however, requires expensive high-precision alignment and adaptation of optical mode profiles. We show that these challenges can be overcome by in situ printing of facet-attached… 

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Three-dimensional microfabrication with two-photon absorbed photopolymerization

  • S. Maruo
  • Physics
    International Commission for Optics
  • 1996
Fabrication technology for three-dimensional microstructures with submicrometer accuracy has been needed in the fields of modern optics, such as micro mechanical system driven with photon pressure[1,

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