In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection.

@article{Mile2010InplaneNR,
  title={In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection.},
  author={Ervin Mile and Guillaume Jourdan and Igor Bargatin and S{\'e}bastien Labarthe and Carine Marcoux and Philippe Andreucci and S{\'e}bastien Hentz and Chady Kharrat and {\'E}ric Colinet and Laurent Duraffourg},
  journal={Nanotechnology},
  year={2010},
  volume={21 16},
  pages={
          165504
        }
}
We report an actuation/detection scheme with a top-down nanoelectromechanical system (NEMS) for frequency shift based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-plane motion transduction. The process fabrication is fully CMOS (complementary metal-oxide-semiconductor) compatible. The results show a very large dynamic range of more than 100 dB and an unprecedented signal to background ratio of 69 dB providing… CONTINUE READING

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