In-line thickness control of self-sensing cantilevers for advanced AFM applications

@article{Stavrov2017InlineTC,
  title={In-line thickness control of self-sensing cantilevers for advanced AFM applications},
  author={Vladimir Stavrov and Galina Stavreva and Emil Tomerov and Vencislav Todorov and Ivan Ch Buchvarov},
  journal={2017 40th International Spring Seminar on Electronics Technology (ISSE)},
  year={2017},
  pages={1-4}
}
Thickness control data measured at different fabrication stages of atomic force microscopy (AFM) self-sensing cantilevers are presented in this paper. Specifically, the thicknesses of multilayered structures comprising silicon, silicon dioxide and thin patterned layers have been measured in-line during multi-step devices' processing. The data of the electrically detected resonance frequencies of the cantilevers have been correlated with the optically thickness measurement. Data interpretation… CONTINUE READING