In-Situ Pressure Measurements of Encapsulted Gyroscopes

Abstract

This paper presents new type of test structures based on the Pirani principle. They were realized together with a gyroscope in a 50 mum SOI (silicon-on-insulator)-based technology to measure the encapsulated pressure of Coriolis vibrating gyroscopes (CVG) but might also be adapted to other devices. Design and optimization of the test structures was carried… (More)

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