In-Line Inspection of Hotspots and Monitoring Strategies

  title={In-Line Inspection of Hotspots and Monitoring Strategies},
  author={Amit Srivastava and Hoang K. Nguyen and Thomas Herrmann and Remo Kirsch and Rajeev M. Kini},
  journal={IEEE Transactions on Semiconductor Manufacturing},
Design Hotspots are features on a silicon chip, which are susceptible to pattern failures. While multiple methods like DRC, ORC, and in-line defect inspection are used to identify these hotspots, in-line monitoring of these Design Hotspots has remained a challenge. Existing methods of hotspot inspection, which include API and EBI are not suited for large… CONTINUE READING