Improvements in performance of focused ion beam cross-sectioning: aspects of ion-sample interaction.

@article{Ishitani2004ImprovementsIP,
  title={Improvements in performance of focused ion beam cross-sectioning: aspects of ion-sample interaction.},
  author={Tohru Ishitani and Kaoru Umemura and Tsuyoshi Ohnishi and Toshie Yaguchi and Takeo Kamino},
  journal={Journal of electron microscopy},
  year={2004},
  volume={53 5},
  pages={443-9}
}
A gallium (Ga) focused ion beam (FIB) has been applied increasingly to 'site-specific' preparation of cross-sectional samples for transmission electron microscopy (TEM), scanning TEM, scanning electron microscopy and scanning ion microscopy. It is absolutely required for FIB cross-sectioning to prepare higher-quality samples in a shorter time without sacrificing the site specificity. The present paper clarifies the parameters that impose limitation on the following performances of the FIB cross… CONTINUE READING

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