Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering

@inproceedings{Yen2014ImprovementIP,
  title={Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H2 Sintering},
  author={Li-Chen Yen and Ming-Tsyr Tang and Fang-Yu Chang and Tung-Ming Pan and Tien-Sheng Chao and Chiang-Hsuan Lee},
  booktitle={Sensors},
  year={2014}
}
In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H2 sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H2 sintering exhibited a high sensitivity than that without H2 sintering. This result may be due to the resulting increase in the number of Si-OH2(+) and Si-O(-) bonds due to the incorporation of H in the gate oxide to reduce the dangling silicon… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 16 REFERENCES

New technology for the detection of pH.

  • Journal of biochemical and biophysical methods
  • 2005
VIEW 1 EXCERPT