Improved simple simulation models for semiconductor wafer factories

  title={Improved simple simulation models for semiconductor wafer factories},
  author={Oliver Rose},
  journal={2007 Winter Simulation Conference},
  • Oliver Rose
  • Published 2007 in 2007 Winter Simulation Conference
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundreds of machines of different types, and automated transport lead to a system complexity which is hard to understand and hard to handle. For educating planners and developing adequate material flow control mechanisms, simple models for this complex environment are required. Several years ago, we published some first… CONTINUE READING
Highly Cited
This paper has 23 citations. REVIEW CITATIONS
15 Extracted Citations
0 Extracted References
Similar Papers

Citing Papers

Publications influenced by this paper.
Showing 1-10 of 15 extracted citations

Similar Papers

Loading similar papers…