Improved direct inverse tracking control of a piezoelectric tube scanner for high-speed AFM imaging☆

@inproceedings{Lu2015ImprovedDI,
  title={Improved direct inverse tracking control of a piezoelectric tube scanner for high-speed AFM imaging☆},
  author={Han Lu and Yongchun Fang and Xiao Ren and Xuebo Zhang},
  year={2015}
}
Abstract For a piezoelectric tube scanner (PTS), this paper proposes an improved direct inverse tracking control algorithm and apply it to an atomic force microscope (AFM) to accomplish high-speed scanning tasks. That is, to enhance the high-speed tracking control performance of a PTS, an improved direct inverse rate-dependent Prandtl–Ishlinskii (P–I) model is firstly constructed, which includes a polynomial module to eliminate the structure nonlinearity. Based on the model, a practical… CONTINUE READING

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