Improved Micromachined Terahertz On-Wafer Probe Using Integrated Strain Sensor

@article{Yu2013ImprovedMT,
  title={Improved Micromachined Terahertz On-Wafer Probe Using Integrated Strain Sensor},
  author={Qiang Yu and Matthew F. Bauwens and Chunhu Zhang and Arthur W. Lichtenberger and Robert M. Weikle and N. Scott Barker},
  journal={IEEE Transactions on Microwave Theory and Techniques},
  year={2013},
  volume={61},
  pages={4613-4620}
}
This paper introduces an improved method for monitoring and controlling the contact condition of terahertz on-wafer probes to enhance the measurement repeatability as well as probe lifetime. This method enables accurate contact force and contact angle measurements without modification to the standard probe station. Both probe contact force and contact angle are crucial for RF measurement repeatability. Repeatable probe contact force can be achieved by properly monitoring and controlling the… CONTINUE READING

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