Improved Design Methodology for the Development of Electrically Actuated MEMS Structures

Abstract

A comprehensive design flow is proposed for the design of Micro Electro Mechanical Systems that are fabricated using SOIMumps process. Many of the designers typically do not model the temperature dependency of electrical conductivity, thermal conductivity and convection coefficient, as it is very cumbersome to create/incorporate the same in the existing FEM… (More)
DOI: 10.1109/VLSID.2014.93

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