Improved CdTe Solar-Cell Performance by Plasma Cleaning the TCO Layer

  title={Improved CdTe Solar-Cell Performance by Plasma Cleaning the TCO Layer},
  author={Drew E. Swanson and Russell M. Geisthardt and J. Tyler McGoffin and John Dalton Williams and James R. Sites},
  journal={IEEE Journal of Photovoltaics},
A hollow-cathode plasma-cleaning source, designed for uniformity, was added to the load-lock region of an existing single-vacuum CdTe-cell fabrication system. This plasma source cleans the transparent-conductive-oxide layer of the cell prior to the deposition of the CdS and CdTe layers. This plasma exposure enables both thinner CdS layers and enhanced cell voltage. The net result is a reduction in CdS thickness by approximately 20 nm, while maintaining the same cell voltage or, equivalently, an… CONTINUE READING
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