Implementation and Self-Tuning Adaptive Control Design of an Electromagnetic Submicro-positioner

Abstract

A novel, compact and two degree-of-freedom (DOF) submicro-positioner with a large travel range is presented. The design of the submicro-positioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and eddy current sensors to achieve the 2-DOF motion. We have analyzed the dynamics of the positioner and derived its… (More)
DOI: 10.1109/ICICIC.2006.462

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