Impact of transistor-to-grain size statistics on large-grain polysilicon TFT characteristics

@article{Cheng2004ImpactOT,
  title={Impact of transistor-to-grain size statistics on large-grain polysilicon TFT characteristics},
  author={C. Cheng and M Poon and C. W. Kok and Mansun Chan},
  journal={IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.},
  year={2004},
  pages={789-792}
}
A model based on grain-boundary distribution to predict the impact of transistor-to-grain size statistics on transistor performance variation is proposed and extensively verified by experimental data. Using the model, optimization of transistor dimension with respect to grain size to achieve high mobility and low transistor-to-transistor variation to… CONTINUE READING