Impact of the electrodes on the tunability of paraelectric BST film based FBARs

@article{Gevorgian2010ImpactOT,
  title={Impact of the electrodes on the tunability of paraelectric BST film based FBARs},
  author={Spartak Gevorgian and A. S. Vorobiev},
  journal={The 40th European Microwave Conference},
  year={2010},
  pages={1210-1213}
}
It is shown that tunability of the paraelectric film based FBARs is substantially suppressed by the electrodes. Electrodes with higher impedance “push” the acoustic field from non-tunable electrodes into tunable ferroelectric film thereby increase the tuning of the resonant frequency and effective coupling coefficient. 

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References

Publications referenced by this paper.
SHOWING 1-8 OF 8 REFERENCES

BAW resonator design considerations - An overview

  • 2008 IEEE International Frequency Control Symposium
  • 2008
VIEW 1 EXCERPT

Low phase noise, FBAR-based voltage controlled oscillator without varactor

  • The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • 2005
VIEW 1 EXCERPT

Design, integration and characterization of PZT tunable FBAR

  • 14th IEEE International Symposium on Applications of Ferroelectrics, 2004. ISAF-04. 2004
  • 2004
VIEW 1 EXCERPT

Tuneable Bulk Acoustic Resonator (TFBAR), International Patent Application PCT/SE2004/001099

S. Gevorgian, T. Lewin, H. Jacobsson, A. Vorobiev
  • 2004
VIEW 3 EXCERPTS

A 2GHz voltage tunable FBAR oscillator

  • IEEE MTT-S International Microwave Symposium Digest, 2003
  • 2003
VIEW 1 EXCERPT

Electromechanical Behavior of Single- Crystal Strontium Titanate

G. Rupprecht, W. H. Winner
  • Phys. Rev.,
  • 1967
VIEW 2 EXCERPTS