Impact of electrode surface modulation on time-dependent dielectric breakdown

Abstract

This study demonstrates the impact of electrode surface modulation on conduction mechanism and TDDB behavior. We found that the Schottky barrier height can be decreased by an unexpected change of the electrode surface materials, due to introduction of new barrier/seed materials. As TDDB is an electron-fluence driven mechanism, the changes of barrier height… (More)
DOI: 10.1109/IRPS.2015.7112668