Impact of constant current stressing procedure on Stress Induced Leakage current generation in thin oxides

The aim of this paper is to investigate the impact of the stressing procedure on the generation. of the stress induced leakage current (SILe). It is found that the generated SILe amplitude is strongly dependent on the stressing step and time at which it is measured after stress. It is also demonstrated that the SILe generation is· not only dependent on the… CONTINUE READING