Impact energy dependence of SF5+-induced damage in poly(methyl methacrylate) studied using time-of-flight secondary ion mass spectrometry.

@article{Wagner2004ImpactED,
  title={Impact energy dependence of SF5+-induced damage in poly(methyl methacrylate) studied using time-of-flight secondary ion mass spectrometry.},
  author={Matthew S Wagner},
  journal={Analytical chemistry},
  year={2004},
  volume={76 5},
  pages={1264-72}
}
Ion-induced damage of polymers is a critical factor in the depth profiling of polymer surfaces using polyatomic primary ions. In this study, time-of-flight secondary ion mass spectrometry was used to measure the damage of spin-cast poly(methyl methacrylate) (PMMA) films under 5-keV Cs(+) and 2.5-8.75-keV SF(5)(+) bombardment. Under 5-keV Cs(+) bombardment, the characteristic PMMA secondary ion intensities decreased rapidly for primary ion doses above 5 x 10(13) ions/cm(2). The damage profiles… CONTINUE READING
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