Imaging of the Asymmetric DC Discharge: Visualization to Adjust Plasma in the Novel PECVD Reactor

@article{Primc2014ImagingOT,
  title={Imaging of the Asymmetric DC Discharge: Visualization to Adjust Plasma in the Novel PECVD Reactor},
  author={Gregor Primc and Igor Levchenko and Shailesh Kumar and Uro{\vs} Cvelbar and Miran Mozetic and Kostya Ken Ostrikov},
  journal={IEEE Transactions on Plasma Science},
  year={2014},
  volume={42},
  pages={2564-2565}
}
Normal asymmetric glow dc discharge in the thermal furnace converted into the efficient PECVD system was imaged to adjust the structure of the plasma column to the two possible localizations of the process zone. The visualization revealed the possibility to use short and long discharge configurations for the plasma-enabled growth and processing of various nanostructures in the modified setup. Images of the discharge in the two localizations are presented.