Image Reversal Techniques with Standard Positive Photoresist

Abstract

The basic reaction of positive photoresist involves the conversion of the dissolution inhibitor (diazoketone) to a dissolution enhancer (carboxylic acid). The novolac-type resin is basically unchanged, but its solubility is controlled by the presence of either the dissolution inhibitor or enhancer. It has been demonstrated that the dissolution enhancer can… (More)

Topics

1 Figure or Table

Slides referencing similar topics