IR imaging using uncooled microcantilever detectors.


Uncooled bimaterial microcantilever detectors were fabricated and used to obtain infrared (IR) images of objects at temperatures ranging from room temperature to a few hundred degrees C. Images were obtained using both single 50 micro m x 50 micro m microcantilever IR detectors and arrays of microcantilever detectors. Thermal radiation from the target… (More)