INVESTIGATION OF THE OXIDATION OF TANTALUM NITRIDE LAYERS BY RBS AND AES METHODS AND BY THE MEASURING OF THE RESISTANCE, RESPECTIVELY.

@inproceedings{Kolonits1980INVESTIGATIONOT,
  title={INVESTIGATION OF THE OXIDATION OF TANTALUM NITRIDE LAYERS BY RBS AND AES METHODS AND BY THE MEASURING OF THE RESISTANCE, RESPECTIVELY.},
  author={V. P. Kolonits and E. K{\'o}tai and Gy Hars and Jozsef Gyulai},
  year={1980}
}