• Physics
  • Published 1991

INFLUENCE OF SURFACE TOPOGRAPHY ON THE SPUTTE RING YIELDS OF SILVER

@inproceedings{Pan1991INFLUENCEOS,
  title={INFLUENCE OF SURFACE TOPOGRAPHY ON THE SPUTTE RING YIELDS OF SILVER},
  author={Ji-cai Pan},
  year={1991}
}
The angular distributions and yields of silver atoms sputtered from a Ag sample have been measured using collector technique and RBS analysis. The Ag target was sputtered at normal incidence with 27keV Ar+ ions. The irradiated surface was examined by scanning electron microscopy. It was found that all the angular distributions were over-cosine with different irradiation dose, but the sputtering yields were dose-dependent. The experimental result can be explained with surface topography and… CONTINUE READING