IIb-8 micromechanical light modulator array fabricated on silicon

Abstract

We report here on the fabrication of a new integrated device, with non-linear characteristics that extend from DC up to optical frequencies. Electrons that unnelofrom one metal to the other through a thin oxide (-10 A), in less than sec are responsible for a fast response, and the non-linear I-V characteristic of the device.’m2 Due to the extremely… (More)

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