IIB-3 a self-aligned oxygen-implanted SOI (SALOX SOI) technology

@article{Tzeng1986IIB3AS,
  title={IIB-3 a self-aligned oxygen-implanted SOI (SALOX SOI) technology},
  author={J S Tzeng and W. Baerg and C H Ting and B. Siu},
  journal={IEEE Transactions on Electron Devices},
  year={1986},
  volume={33},
  pages={1841-1842}
}