I-IV/P15 Microcrystalline Silicon Thin Film Transistors Obtained by Hot-WireCVD

Abstract

Polysilicon Thin Film Transistors (TFT) are of great interest in the field of large area microelectronics, especially because of their application as active elements in Flat Panel Displays. Different deposition techniques are in tough competition with the objective to obtain device-quality polysilicon thin films at low temperature. In this paper we present… (More)

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