Hydrodynamic Performance of Gas Microbearings

Abstract

Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using Molecular Gas Lubrication (MGL) theory. Threshold speed and allowable rotor mass were calculated to investigate safe operating conditions of the fabricated gas microbearings using orbit simulation. Finally, improved bearing designs were proposed to increase stability. @DOI: 10.1115/1.1792676#

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Cite this paper

@inproceedings{Kim2004HydrodynamicPO, title={Hydrodynamic Performance of Gas Microbearings}, author={Daejong Kim and Sanghoon Lee and Michael D. Bryant and Frederick F. Ling}, year={2004} }