Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness

@article{Hamelin2015HighlysymmetricSD,
  title={Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness},
  author={Benoit Hamelin and Vahid Tavassoli and Farrokh Ayazi},
  journal={2015 IEEE SENSORS},
  year={2015},
  pages={1-4}
}
A highly-symmetric silicon dioxide shallow shell resonator with angstrom-level roughness (Ra=4.3Å) is presented. Curvature discontinuities in shallow shells, at a controlled distance from the base anchor of the shell, provide acoustic decoupling and significantly reduce the anchor contribution to the frequency split in degenerate wineglass modes as well as their damping. The Finite Element Method (FEM) simulations, performed in COMSOL 4.4, show increasing strain energy density at the vicinity… CONTINUE READING

Citations

Publications citing this paper.

References

Publications referenced by this paper.
Showing 1-10 of 14 references

Wineglass-on-a-chip

  • P. Shao, L. Sorenson, X. Gao, F. Ayazi
  • Solid-State Sensors, Actuators, and Microsystems…
  • 2012
Highly Influential
5 Excerpts

Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators

  • P. Shao, C.-S. Liu, L. Sorenson, F. Ayazi
  • Micro Electro Mechanical Systems (MEMS), 2014…
  • 2014
2 Excerpts

Characterization of 3D MEMS structural dynamics with a conformal multi-channel fiber optic heterodyne vibrometer

  • J. Kilpatrick, A. Apostol, V. Markov
  • Proc. SPIE, vol. 8494, p. 849402, 2012. Figure 4…
  • 2012
2 Excerpts

Optimization of HNA etching parameters to produce high aspect ratio solid silion microneedles

  • A. Hamzah
  • Journal of Micromechanics and Microengineering…
  • 2012
1 Excerpt

Similar Papers

Loading similar papers…